EUV microexposures at the ALS using the 0.3-NA MET projection optics.
| Autor: | Naulleau, Patrick, Goldberg, Kenneth A., Anderson, Erik, Cain, Jason P., Denham, Paul, Hoef, Brian, Jackson, Keith, Morlens, Anne-Sophie, Rekawa, Seno, Dean, Kim |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p56-63, 8p |
| Databáze: | Complementary Index |
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