Inline sidewall angle monitoring of memory capacitor profiles.
| Autor: | Rathsack, Ben M., Bushman, Scott G., Celii, Francis G., Ayres, Stephen F., Kris, Roman |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p1237-1247, 11p |
| Databáze: | Complementary Index |
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