Evaluation of Hitachi CAD to CD-SEM metrology package for OPC model tuning and product devices OPC verification.
| Autor: | Cantu, Pietro, Capetti, Gianfranco, Catarisano, Chiara, D'Angelo, Fabrizio, Evangelista, Elena, Severgnini, Ermes, Trovati, Silvia, Vasconi, Mauro, Sutani, Takumichi, Wahl, Stephan, Steffen, Robert |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p1341-1352, 12p |
| Databáze: | Complementary Index |
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