Overlay measurement accuracy verification using CD-SEM and application to the quantification of WIS caused by BARC.
| Autor: | Lecarpentier, Laurent, Vachellerie, Vincent, Kassel, Elyakim, Avrahamov, Yosef, Huang, Chin-Chou K., Felten, Frank, Polli, Marco, Feneyrou, Aurelien, Thony, Philippe, Guillot, Stephane |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p1413-1423, 11p |
| Databáze: | Complementary Index |
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