Metal etcher qualification using angular scatterometry.
| Autor: | Jekauc, Igor, Moffitt, Jasen, Shakya, Sushil, Donohue, Elizabeth, Dasari, Prasad, Raymond, Christopher J., Littau, Mike |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p259-271, 13p |
| Databáze: | Complementary Index |
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