Performance of measuring contact holes using the Opti-Probe 7341 3-D RT/CD technology.
| Autor: | Sorkhabi, Osman, Pois, Heath, Chu, Hanyou, Wen, Youxian, Opsal, Jon, Kim, Won D. |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p912-921, 10p |
| Databáze: | Complementary Index |
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