Performance of measuring contact holes using the Opti-Probe 7341 3-D RT/CD technology.
Autor: | Sorkhabi, Osman, Pois, Heath, Chu, Hanyou, Wen, Youxian, Opsal, Jon, Kim, Won D. |
---|---|
Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p912-921, 10p |
Databáze: | Complementary Index |
Externí odkaz: |