0.31k1 ArF lithography for 70-nm DRAM.
| Autor: | Bok, Cheolkyu, Lee, Ki-Lyoung, Park, Jun-Taek, Hwang, Young-Sun, Eom, Tae-Seung, Kim, Seo-Min, Lee, Geunsu, Jung, Jae-Chang, Lim, Chang-Moon, Moon, Seung-Chan, Kim, Jin-Woong |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p230-240, 11p |
| Databáze: | Complementary Index |
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