The problem of optimal placement of sub-resolution assist features (SRAF).
| Autor: | Mukherjee, Maharaj, Mansfield, Scott, Liebmann, Lars, Lvov, Alexey, Papadapoulou, Evanthia, Lavin, Mark, Zhao, Zengqin |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p1417-1429, 13p |
| Databáze: | Complementary Index |
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