Mask-induced polarization effects at high NA.
| Autor: | Estroff, Andrew, Fan, Yongfa, Bourov, Anatoly, Smith, Bruce, Foubert, Philippe, Leunissen, L. H. A., Philipsen, Vicky, Aksenov, Yuri |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p555-566, 12p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|