Feasibility of improving CD-SEM-based APC system for exposure tool by spectroscopic-ellipsometry-based APC system.
| Autor: | Lin, Wen-Kuang, Liao, Shih-Hsien, Tsai, Ronghao, Yeh, Mike, Hsieh, Calvino, Yu, Y., Lin, Benjamin Szu-Min, Fu, Steven, Dziura, Thaddeus G. |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p138-144, 7p |
| Databáze: | Complementary Index |
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