65nm OPC and design optimization by using simple electrical transistor simulation.
| Autor: | Trouiller, Yorick, Devoivre, Thierry, Belledent, Jerome, Foussadier, Franck, Borjon, Amandine, Patterson, Kyle, Lucas, Kevin, Couderc, Christophe, Sundermann, Frank, Urbani, Jean-Christophe, Baron, Stanislas, Rody, Yves, Chapon, Jean-Damien, Arnaud, Franck, Entradas, Jorge |
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| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p378-388, 11p |
| Databáze: | Complementary Index |
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