Surface characterization and surface energy measurements on boron phosphide films prepared by PECVD.

Autor: Ogwu, Abraham, Hellwig, Thomas, Doherty, Saul, Haddow, David, Mollman, Klaus-Peter, Placido, Frank
Zdroj: Proceedings of SPIE; Nov2005, Issue 1, p130-136, 7p
Databáze: Complementary Index