Liquid crystal polymer based MEMS capacitive pressure sensor.
| Autor: | Palasagaram, Jithendra N., Ramadoss, Ramesh |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p190-197, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Palasagaram, Jithendra N., Ramadoss, Ramesh |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005, Issue 1, p190-197, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|