Uncertainties in aspheric profile measurements with the geometry measuring machine at NIST.
| Autor: | Griesmann, Ulf, Machkour-Deshayes, Nadia, Soons, Johannes, Kim, Byoung C., Wang, Quandou, Stoup, John R., Assoufid, Lahsen |
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| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p58780D-58780D-13, 13p |
| Databáze: | Complementary Index |
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