Fracture friendly optical proximity correction.
| Autor: | Amoroso, Frank, Cote, Michel, Do, Tanya, Lugg, Robert, Nogatch, John |
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| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p599222-599222-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Amoroso, Frank, Cote, Michel, Do, Tanya, Lugg, Robert, Nogatch, John |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p599222-599222-7, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|