Hybrid ORC method for Low K1 process.

Autor: Nam, Byungho, Choi, Jaeseung, Ahn, Yeongbae, Kim, Cheolkyun, Yune, Hyoungsoon, Moon, James, Yim, Donggyu, Kim, Jinwoong
Zdroj: Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59922T-59922T-9, 9p
Databáze: Complementary Index