Hybrid ORC method for Low K1 process.
Autor: | Nam, Byungho, Choi, Jaeseung, Ahn, Yeongbae, Kim, Cheolkyun, Yune, Hyoungsoon, Moon, James, Yim, Donggyu, Kim, Jinwoong |
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Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59922T-59922T-9, 9p |
Databáze: | Complementary Index |
Externí odkaz: |