Scatterometry based CD and profile metrology of MoSi/quartz structures.
| Autor: | Yedur, Sanjay, Vuong, Vi, Shivaprasad, Deepak, Sarathy, T.P., Tabet, Milad, Korlahalli, Rahul, Hu, Jiangtao |
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| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59924I-59924I-7, 7p |
| Databáze: | Complementary Index |
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