The effect of calibration feature weighting on OPC optical and resist models: investigating the influence on model coefficients and on the overall model fitting.
| Autor: | Abdo, Amr, Fathy, Rami, Madkour, Kareem, Oberschmidt, James, Fischer, Daniel, Talbi, Mohamed |
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| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p599253-599253-8, 8p |
| Databáze: | Complementary Index |
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