Nanoimprint lithography: Review of aspects and applications.
| Autor: | Wagner, D. J., Jayatissa, A. H. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p60020R-60020R-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Wagner, D. J., Jayatissa, A. H. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2005 Part 2, Issue 1, p60020R-60020R-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|