Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers.
| Autor: | Arens, Winfried, Ristau, Detlev, Ullmann, Jens, Zaczek, Christoph, Thielsch, Roland, Kaiser, Norbert, Duparre, Angela, Apel, Oliver, Mann, Klaus R., Lauth, Hans, Bernitzki, Helmut, Ebert, Johanes, Schippel, Stefan, Heyer, H. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p250-259, 10p |
| Databáze: | Complementary Index |
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