Nondestructive inspection of crystal defects in LiNbO3 wafers by using an optical technique.
| Autor: | Yamada, Masayoshi, Matsumura, Masashi, Fukuzawa, Masayuki, Higuma, Kaoru, Nagata, Hirotoshi |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p101-106, 6p |
| Databáze: | Complementary Index |
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