Performance study on thin resist for advanced reticle fabrication.
| Autor: | Kobayashi, Hideo, Higuchi, Takao, Asakawa, Keishi, Yokoya, Yasunori |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p226-234, 9p |
| Databáze: | Complementary Index |
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