Delineation performances of advanced 100-kV EB writer on x-ray membrane mask.
| Autor: | Nakayama, Yoshinori, Aoyama, Hajime, Tsuboi, Shinji, Watanabe, Hiroshi, Kikuchi, Yukiko, Ezaki, Mizunori, Matsui, Yasuji, Morosawa, Tetsuo, Saito, Kenichi, Ohki, Shigehisa, Matsuda, Tadahito |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p105-112, 8p |
| Databáze: | Complementary Index |
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