Investigation of proximity effect correction in electron projection lithography (EPL).
| Autor: | Okino, Teruaki, Suzuki, Kazuaki, Okamoto, Kazuya, Kawata, Shintaro, Uchikawa, Kiyoshi, Suzuki, Syouhei, Shimizu, Sumito, Fujiwara, Tomoharu, Yamada, Atsushi, Kamijo, Koichi |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p235-244, 10p |
| Databáze: | Complementary Index |
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