Experimental validation of a thermal model used to predict the image placement error of a scanned EUVL reticle.
| Autor: | Gianoulakis, Steven E., Craig, Marcus J., Ray-Chaudhuri, Avijit K. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p848-854, 7p |
| Databáze: | Complementary Index |
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