EUVL printing results of a low-thermal expansion material (LTEM) mask.
| Autor: | Tong, William M., Taylor, John S., Hector, Scott D., Shell, Melissa K., Zhang, Guojing, Kearney, Patrick A., Walton, Christopher C., Larson, Cindy C., Wasson, James R., Mangat, Pawitter J. S., O'Connell, Donna J., Folk, Daniel R. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p855-860, 6p |
| Databáze: | Complementary Index |
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