EUV interferometry of a four-mirror ring-field EUV optical system.
| Autor: | Goldberg, Kenneth A., Naulleau, Patrick P., Batson, Phillip J., Denham, Paul, Anderson, Erik H., Bokor, Jeffrey, Chapman, Henry N. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p867-873, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|