EUV interferometry of a four-mirror ring-field EUV optical system.
Autor: | Goldberg, Kenneth A., Naulleau, Patrick P., Batson, Phillip J., Denham, Paul, Anderson, Erik H., Bokor, Jeffrey, Chapman, Henry N. |
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Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p867-873, 7p |
Databáze: | Complementary Index |
Externí odkaz: |