Photomask CD correlation of an optical linewidth measurement tool and a scanning electron microscope with reference to a Stylus NanoProfilometer.
| Autor: | Kasprowicz, Bryan S., Eynon Jr., Benjamin G., Morrison, Troy B., Wang, Chih-Yu |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p338-349, 12p |
| Databáze: | Complementary Index |
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