Subwavelength alignment mark signal analysis of advanced memory products.
| Autor: | Yin, Xiaoming, Wong, Alfred K. K., Wheeler, Donald C., Williams, Gary, Lehner, Eric A., Zach, Franz X., Kim, Byeong Y., Fukuzaki, Yuzo, Lu, Zhijian G., Credendino, Santo, Wiltshire, Timothy J. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p449-459, 11p |
| Databáze: | Complementary Index |
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