Advancements in organic antireflective coatings for dual-damascene processes.
| Autor: | Deshpande, Shreeram V., Shao, Xie, Lamb III, James E., Brakensiek, Nickolas L., Johnson, Joe, Wu, Xiaoming, Xu, Gu, Simmons, William J. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p797-805, 9p |
| Databáze: | Complementary Index |
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