Patterning of hyperbranched resist materials by e-beam.
| Autor: | Trimble, Alexander R., Tully, David C., Frechet, Jean M. J., Medeiros, David R., Angelopoulos, Marie |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p1198-1201, 4p |
| Databáze: | Complementary Index |
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