Structural design of a new class of acetal polymer for DUV resists.
| Autor: | Fujimori, Toru, Tan, Shiro, Aoai, Toshiaki, Nishiyama, Fumiyuki, Yamanaka, Tsukasa, Momota, Makoto, Kanna, Shinichi, Kawabe, Yasumasa, Yagihara, Morio, Kokubo, Tadayoshi, Malik, Sanjay, Ferreira, Lawrence |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p579-590, 12p |
| Databáze: | Complementary Index |
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