Linewidth uniformity error analysis for step-and-scan systems.
| Autor: | Zimmerman, John D., Sumra, Javed, Leong, Y.K. A., Govil, Pradeep K., Baxter, Greg H. |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p785-792, 8p |
| Databáze: | Complementary Index |
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