Preliminary results at the ultradeep x-ray lithography beamline at CAMD.
| Autor: | Aigeldinger, Georg, Coane, Philip J., Craft, Benjamin C., Goettert, Jost, Ledger, Sam, Ling, Zhong G., Manohara, Harish M., Rupp, Louis |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p429-435, 7p |
| Databáze: | Complementary Index |
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