Proximity effect correction for reticle fabrication.
| Autor: | Sugiyama, Masao, Kubo, Shinji, Hiruta, Koji, Iwamatsu, Takayuki, Fujisawa, Tatsuya, Morimoto, Hiroaki |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p180-187, 8p |
| Databáze: | Complementary Index |
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