High-precision metal masking for multiple-wavelength laser diode fabrication using single-step-ion-implantation-induced quantum well intermixing.
| Autor: | Aimez, Vincent, Beauvais, Jacques, Beerens, Jean, Ooi, Boon Siew |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p607-615, 9p |
| Databáze: | Complementary Index |
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