Control of membrane mirror profile by electrostatic field.

Autor: Dimakov, Sergei A., Bogdanov, Mikhail P., Gorlanov, Alexander V., Kislitsyn, Boris V., Zhuk, Dmitrii I.
Zdroj: Proceedings of SPIE; Nov2000, Issue 1, p137-143, 7p
Databáze: Complementary Index