AFM scanning moire method for nanodeformation measurement.
| Autor: | Xie, Huimin, Chai, Gin B., Asundi, Anand K., Yu, Jin, Lu, Yunguang, Ngoi, Bryan K. A., Zhong, Zhaowei, Kishimoto, Satoshi |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p143-151, 9p |
| Databáze: | Complementary Index |
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