Microsystems for diverse applications using recently developed microfabrication techniques.
| Autor: | Dellmann, Laurent, Akiyama, Terunobu, Briand, Danick, Gautsch, Sebastien, Guenat, Olivier T., Guldimann, Benedikt, Luginbuhl, Philippe, Marxer, Cornel, Staufer, Urs, van der Schoot, Bart, de Rooij, Nico F. |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p16-27, 12p |
| Databáze: | Complementary Index |
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