General MEMS process physics simulation and its applications.
| Autor: | Finch, Nora, He, Yie, Marchetti, James |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p217-221, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Finch, Nora, He, Yie, Marchetti, James |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p217-221, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|