Design and fabrication of a micromechanical inverter.
| Autor: | Chae, Kyoung-Soo, Han, Seungoh, Song, Minseok, Moon, Sung W., Pak, James Jungho |
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| Zdroj: | Proceedings of SPIE; Nov2000 Part 2, Issue 1, p508-514, 7p |
| Databáze: | Complementary Index |
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