AirJet paper mover: an example of mesoscale MEMS.
| Autor: | Biegelsen, David K., Berlin, Andrew A., Cheung, Patrick, Fromherz, Markus P., Goldberg, David, Jackson, Warren B., Preas, Bryan, Reich, James, Swartz, Lars E. |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p122-129, 8p |
| Databáze: | Complementary Index |
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