Scanning silicon micromirror using a bidirectionally movable magnetic microactuator.
| Autor: | Cho, Hyoung J., Yan, Jun, Kowel, Stephen T., Beyette Jr., Fred R., Ahn, Chong H. |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p106-115, 10p |
| Databáze: | Complementary Index |
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