Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages.
| Autor: | Shea, Herbert R., Gasparyan, Arman, White, Carolyn D., Comizzoli, Robert B., Abusch-Magder, David, Arney, Susanne |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p117-122, 6p |
| Databáze: | Complementary Index |
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