Ultrasonic actuation for MEMS dormancy-related stiction reduction.
| Autor: | Kaajakari, Ville, Kan, Shyi-Herng, Lin, Li-Jen, Lal, Amit, Rodgers, M. Steven |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p60-65, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|