Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures.
| Autor: | White, Carolyn D., Shea, Herbert R., Cameron, Kimberly K., Pardo, Flavio, Bolle, Cristian A., Aksyuk, Vladimir A., Arney, Susanne |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p91-95, 5p |
| Databáze: | Complementary Index |
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