Planarization approaches to via-first dual-damascene processing.
| Autor: | Pavelchek, Edward K., Cernigliaro, Marjorie, Trefonas III, Peter, doCanto, Manuel |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p140-151, 12p |
| Databáze: | Complementary Index |
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