Small signal ac-surface photovoltage technique for noncontact monitoring of near-surface doping for IC-processing.
| Autor: | Marinskiy, Dmitriy N., Lagowski, Jacek J., Wilson, M., Jastrzebski, Lubek, Santiesteban, R., Elshot, Kim |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p72-77, 6p |
| Databáze: | Complementary Index |
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