Development of a microrobot-based micromanipulation cell in a scanning electron microscope (SEM).

Autor: Schmoeckel, Ferdinand, Fahlbusch, Stephan, Seyfried, Joerg, Buerkle, Axel, Fatikow, Sergej
Zdroj: Proceedings of SPIE; Nov2000, Issue 1, p129-140, 12p
Databáze: Complementary Index