Development of a microrobot-based micromanipulation cell in a scanning electron microscope (SEM).
Autor: | Schmoeckel, Ferdinand, Fahlbusch, Stephan, Seyfried, Joerg, Buerkle, Axel, Fatikow, Sergej |
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Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p129-140, 12p |
Databáze: | Complementary Index |
Externí odkaz: |