Optimization of the planarizing performance of a DUV organic bottom antireflective coating for via first dual-damascene process: cooperation to achieve material and process characterization.
| Autor: | Williams, Paul, Martin, Alice, Strobl, Marlene, Roberts, William R., Goodwin, Francis G., Voelkel, Lars, Feicke, Axel, Trautman, Sean, Lamb III, James E. |
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| Zdroj: | Proceedings of SPIE; Nov2000, Issue 1, p160-168, 9p |
| Databáze: | Complementary Index |
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